The role of fluorination during the physicochemical erosion of yttria in fluorine-based etching plasmas

Kindelmann, Moritz (Corresponding author); Weber, Moritz L.; Stamminger, Mark; Buschhaus, Rahel; Wessel, Egbert; Bram, Martin; Guillon, Olivier

Amsterdam [u.a.] : Elsevier Science (2021, 2022)
Fachzeitschriftenartikel

In: Journal of the European Ceramic Society
Band: 42
Heft: 2
Seite(n)/Artikel-Nr.: 561-566