The role of fluorination during the physicochemical erosion of yttria in fluorine-based etching plasmas

Kindelmann, Moritz (Corresponding author); Weber, Moritz L.; Stamminger, Mark; Buschhaus, Rahel; Wessel, Egbert; Bram, Martin; Guillon, Olivier

Amsterdam [u.a.] : Elsevier Science (2021, 2022)
Journal Article

In: Journal of the European Ceramic Society
Volume: 42
Issue: 2
Page(s)/Article-Nr.: 561-566