The role of fluorination during the physicochemical erosion of yttria in fluorine-based etching plasmas

Kindelmann, Moritz (Corresponding author); Weber, Moritz L.; Stamminger, Mark; Buschhaus, Rahel; Wessel, Egbert; Bram, Martin; Guillon, Olivier

Amsterdam [u.a.] : Elsevier Science (2021, 2022)
Journal Article

In: Journal of the European Ceramic Society
Volume: 42
Issue: 2
Page(s)/Article-Nr.: 561-566

Institutions

• Central Facility for Electron Microscopy [025000]
• JARA - FIT [080009]
• Division of Materials Science and Engineering [520000]
• Chair of Ceramics and Institute of Mineral Engineering [524110]
• Chair of Materials Synthesis in Energy Technology [524510]