Processing map to control the erosion of Y$_{2}$O$_{3}$ in fluorine based etching plasmas

Kindelmann, Moritz (Corresponding author); Weber, Moritz Lukas; Stamminger, Mark; Buschhaus, Rahel; Breuer, Uwe; Bram, Martin; Guillon, Olivier

Oxford [u.a.] : Wiley-Blackwell (2022)
Journal Article

In: Journal of the American Ceramic Society
Volume: 105
Issue: 5
Page(s)/Article-Nr.: 3498-3506

Institutions

• Central Facility for Electron Microscopy [025000]
• JARA - ENERGY [080011]
• Division of Materials Science and Engineering [520000]
• Chair of Ceramics and Institute of Mineral Engineering [524110]
• Chair of Materials Synthesis in Energy Technology [524510]